X-rays taken in the team's training room were negative, but the veteran center did not return to play.
Ilgauskas became tangled with 76ers center Samuel Dalembert about 10 feet from the basket and landed awkwardly on his left foot with 9:34 to play in the first quarter. Ilgauskas, who has had a history of foot problems throughout his career, fell hard to the court and rolled around in pain.
After a few moments, the 7-foot-3 center got up and walked on his own to the locker room for examination.
Ilgauskas missed the 1999-2000 season with a broken bone in his left foot. He missed his entire rookie season in 1996-97 with a broken right foot.
The veteran center has missed only one game this season and has played in 313 of a possible 320 games since the start of the 2001-02 season, however.
Ilgauskas is averaging 16.1 points and 7.7 rebounds for Cleveland, which has qualified for the postseason for the first time since 1998 but is batting to secure the fourth seed and homecourt advantage in the first round.